UHV - Deposition system combining molecular evaporator
(Creaphys DE-FR/2.2), thermal boat evaporator and pulsed laser
deposition
Continous wave Laser-Induced Forward transfer system. System is based on Micro-CNC machine (Gravos GV-21) with resolution ~300 nm with diode laser at wavelength of 405 nm, continual laser with power up to 50 mW, focusing optics and laser beam to spot ~5 µm. Application: Laser direct write, CW-LIFT, CW-LIBT, Laser annealing
General equipment for sensor testing
In-house developed systems for measurement of sensor properties
Pfeiffer Vacuum Omnistar GSD 320 - gas analyser with quadrupole mass
spectrometer
Gas Dortmund - GC-IMS - gas chromatograph with ion mobility
detector
Gas mixer with permeation tube vapor generator Sonimix
Cells for testing of sensors with connection to gas distribution
system
Ozone generators; Gas distribution systems, device for mixing of gas
mixtures based on mass flow controllers
Equipment for measurement of electrophysical parameters
Quantum Design PPMS (Physical Property Measurement System) with
modules for measurement of electro-transport properties in temperature
range 1.85-400 K and magnetic fields up to 9 T
Electrometer Keithley 6517A - precise measurement of high resistance
materials with in-house fixtures with triaxial interconnection
Delta mode system Keithley 6221/2182 - low noise resistivity
measurement
Impedance analysers Agilent 4294A, HP4192A
Gamry Reference 600 - impedance spectroscopy of solid state
materials (layers)
Turbo pumped vacuum LN cryostat for impedance measurements
